VACUUM PUMP AND DAMPER FOR VACUUM PUMP

Title:

VACUUM PUMP AND DAMPER FOR VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2019/181705

Kind Code:

A1

Abstract:

Provided are a vacuum pump and a damper for a vacuum pump having a simple structure and capable of enhancing vibration isolation in a twisting direction, and capable of preventing breaking of and damage to an O-ring and a resilient body by restricting displacement between opposing flanges. This vacuum pump is provided with a first flange (13) and a second flange (14) displaced facing one another and having an annular shape, an intermediate ring (15) disposed between the first flange (13) and the second flange (14), O-rings (16) disposed between the first flange (13) and the intermediate ring (15) and between the intermediate ring (15) and the second flange (14), a plurality of resilient bodies (17) disposed at various points in the circumferential direction of a central opening (13a, 14a), between the first flange (13) and the second flange (14), and a hermetic holding means (51) including positioning pins (41) disposed to pass in order through positioning holes (13e, 15e, 14e) provided in each of the first flange (13), the intermediate ring (15), and the second flange (14).

Inventors:

KAWASHIMA TOSHIAKI (JP)

Application Number:

PCT/JP2019/010417

Publication Date:

September 26, 2019

Filing Date:

March 13, 2019

Export Citation:

Click for automatic bibliography generation Help

Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04D29/66; F04B37/16; F04D19/04; F04D29/08; F04D29/42; F16F15/08

Foreign References:

GB2552324A	2018-01-24
JP2010169102A	2010-08-05
US5671956A	1997-09-30
JPS5023368Y1	1975-07-15
JP2011226466A	2011-11-10
JP2003003988A	2003-01-08
JPS6133919B2	1986-08-05

Other References: