VACUUM PUMP DEVICE, AND PUMP MAIN BODY UNIT, CONTROL UNIT AND SPACER USED IN VACUUM PUMP DEVICE

Title:

VACUUM PUMP DEVICE, AND PUMP MAIN BODY UNIT, CONTROL UNIT AND SPACER USED IN VACUUM PUMP DEVICE

Document Type and Number:

WIPO Patent Application WO/2018/135412

Kind Code:

A1

Abstract:

[Problem] The present invention addresses the problem of providing a vacuum pump device, whereby the thickness, weight, and size of a vacuum pump control device can be reduced, and cost can be reduced. [Solution] A vacuum pump device (10) is formed by integrating with each other a pump main body unit (11) and a control unit (12) that controls drive of the pump main body unit (11). The vacuum pump device is configured such that a spacer (13), which supports a load applied to a housing (22) of the control unit (12), is provided between a base (15) of the pump main body unit (11), and the housing (22) of the control unit (12).

Inventors:

SAKAGUCHI YOSHIYUKI (JP)
SUN YANBIN (JP)
SAEGUSA KENGO (JP)
OMORI HIDEKI (JP)

Application Number:

PCT/JP2018/000698

Publication Date:

July 26, 2018

Filing Date:

January 12, 2018

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04B39/00; F04B37/16; F04D19/04; F04D29/64; H05K5/02

Foreign References:

JP3165857B2	2001-05-14
JPS6246898U	1987-03-23
JP2000183552A	2000-06-30
JP3165857B2	2001-05-14

Other References: