Title:
VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND PRODUCTION METHOD FOR ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/189833
Kind Code:
A1
Abstract:
The vapor deposition device disclosed in the embodiments is structured such that an electromagnet (3) is used to attract a vapor deposition mask (1). The electromagnet (3) includes: a first electromagnet (3A) that generates a magnetic field in a first direction; and a second electromagnet (3B) that generates a magnetic field in a second direction that is opposite the first direction. When current is applied, simultaneous activation of the first and second electromagnets (3A, 3B) weakens the generated magnetic field. If the second electromagnet (3B) is then turned off, the original magnetic field can be achieved. As a result, the effects of electromagnetic induction are suppressed, as are defects in an element, etc. that is formed on a vapor deposition substrate and degradation of element characteristics. Deactivation of the second electromagnet after current has been applied makes it possible to achieve normal attractive force.
Inventors:
KISHIMOTO KATSUHIKO (JP)
Application Number:
PCT/JP2017/014996
Publication Date:
October 18, 2018
Filing Date:
April 12, 2017
Export Citation:
Assignee:
SAKAI DISPLAY PRODUCTS CORP (JP)
International Classes:
C23C14/04; H01L27/32; H01L51/50; H05B33/10
Foreign References:
| JPH10152776A | 1998-06-09 | |||
| JP2010106360A | 2010-05-13 | |||
| JP2003187973A | 2003-07-04 |
Attorney, Agent or Firm:
ASAHINA & CO. (JP)
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