Title:
VAPOR DEPOSITION DEVICE, SUBLIMATION REFINING DEVICE, ORGANIC ELECTRONIC DEVICE PRODUCTION METHOD AND SUBLIMATION REFINING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/112019
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a practical vapor deposition device or the like, by which the load on a circuit resulting from a large current is suppressed, while an induction heating method is used. Provided is a vapor deposition device for forming an organic material into a film on a substrate. The vapor deposition device comprises: a container which accommodates the organic material, and at least a portion of which is constituted of a conductor; a heating coil disposed in the periphery of the container; a direct current power source; an inverter connected to the direct current power source; a primary coil connected to the inverter; and a secondary coil connected to the heating coil. The primary coil and the secondary coil form a matching transformer.
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Inventors:
KOBAYASHI SHINICHIRO (JP)
TAKEDA KENGO (JP)
MIYAZAKI HIROSHI (JP)
TAKEDA KENGO (JP)
MIYAZAKI HIROSHI (JP)
Application Number:
PCT/JP2020/044341
Publication Date:
June 10, 2021
Filing Date:
November 27, 2020
Export Citation:
Assignee:
FUKUOKA INDUSTRY SCIENCE & TECH FOUNDATION (JP)
International Classes:
C23C14/24; B01D7/02; H01L51/50; H05B6/04; H05B33/10
Foreign References:
| JP2019173154A | 2019-10-10 | |||
| JP2012228150A | 2012-11-15 | |||
| JP2016015419A | 2016-01-28 | |||
| JP2018063368A | 2018-04-19 | |||
| JP2018225361A | 2018-11-30 | |||
| JP2018225362A | 2018-11-30 | |||
| JP2018225363A | 2018-11-30 | |||
| JP2018225364A | 2018-11-30 |
Other References:
MASAO OGOSHI: "Research on commercial induction heating high frequency inverters containing boost chopper circuits", MASTER'S THESIS, 1 January 2009 (2009-01-01), JP, pages 1 - 95, XP009537259
"LLC", TOSHIBA ELECTRIC DEVICES & STORAGE CORPORATION, 12 November 2019 (2019-11-12), XP055832243, Retrieved from the Internet
"LLC", TOSHIBA ELECTRIC DEVICES & STORAGE CORPORATION, 12 November 2019 (2019-11-12), XP055832243, Retrieved from the Internet
Attorney, Agent or Firm:
MINE Masaki (JP)
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