Title:
VERTICAL OXIDATION FURNACE DOOR SWINGING APPARATUS AND VERTICAL OXIDATION FURNACE
Document Type and Number:
WIPO Patent Application WO/2022/160546
Kind Code:
A1
Abstract:
Disclosed in the present invention is a vertical oxidation furnace door swinging apparatus, comprising a furnace door assembly (1) and a mounting seat (2). A lifting and lowering mechanism (3) is provided on the mounting seat (2); the lifting and lowering mechanism (3) is provided with a rotating mechanism (4); the axis of the rotating mechanism (4) is arranged in a vertical direction; and a swinging arm assembly (5) is connected between the furnace door assembly (1) and the rotating mechanism (4). Further disclosed in the present invention is a vertical oxidation furnace, comprising a rack and further comprising the foregoing vertical oxidation furnace door swinging apparatus. The mounting seat (2) is provided on the rack. The present invention has the advantages of being convenient to use, facilitating the heat insulation of a furnace hearth, preventing the heat dissipation of the furnace hearth from affecting other parts, and the like.
Inventors:
ZENG YUMIN (CN)
DENG BIN (CN)
WANG XUESHI (CN)
DENG BIN (CN)
WANG XUESHI (CN)
Application Number:
PCT/CN2021/098528
Publication Date:
August 04, 2022
Filing Date:
June 07, 2021
Export Citation:
Assignee:
THE 48TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECH GROUP CORPORATION (CN)
International Classes:
F27D1/18; H01L21/67
Foreign References:
| CN203744726U | 2014-07-30 | |||
| CN111637738A | 2020-09-08 | |||
| CN202756564U | 2013-02-27 | |||
| CN201532119U | 2010-07-21 | |||
| CN203672136U | 2014-06-25 | |||
| US4747582A | 1988-05-31 |
Attorney, Agent or Firm:
HUNAN ZHAOHONG PATENT LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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