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Title:
VIBRATION SUPPRESSION MECHANISM ATTACHED TO CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/003494
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a vibration suppression mechanism which is easily attachable and detachable and which is attached to a charged particle beam device. As one embodiment for achieving said purpose, proposed is a vibration suppression mechanism which is provided with: a first arcuate member (21a) having an inner wall surface shaped along the outer wall of a lens barrel of a charged particle beam device; a second arcuate member (21b) which has an inner wall surface shaped along the outer wall of a mirror body of the charged particle beam device and which is connected to the first arcuate member to form an annular member that surrounds the outer wall of the mirror body of the charged particle beam device; a fastening member (21c) which fastens the first and second arcuate members together; a vibration sensor (23) which is attached to the arcuate members; and an actuator (22) which operates in accordance with an output of the vibration sensor, the vibration suppression mechanism being detachable when the connection formed by a connection member is released.

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Inventors:
TAKAHASHI HIROKI (JP)
NAKAGAWA SHUICHI (JP)
SHIMIZU TOSHIHIKO (JP)
OGAWA HIRONORI (JP)
ARISAKA TOSHIHIRO (JP)
Application Number:
PCT/JP2017/021906
Publication Date:
January 04, 2018
Filing Date:
June 14, 2017
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORP (JP)
International Classes:
H01J37/16; F16F15/02
Foreign References:
JP2016051536A2016-04-11
JP2016039686A2016-03-22
JPS6313929A1988-01-21
JP2013026150A2013-02-04
Attorney, Agent or Firm:
TODA Yuji (JP)
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