Title:
WAVEFRONT RECONSTRUCTION DEVICE AND METHOD BASED ON EXTENDED ROTATIONALLY SYMMETRIC STRUCTURED LIGHT ILLUMINATION
Document Type and Number:
WIPO Patent Application WO/2021/068594
Kind Code:
A1
Abstract:
Disclosed is a wavefront reconstruction device based on extended rotationally symmetric structured light illumination. The device comprises a laser (1), an attenuation mirror (2), a microscope objective lens (3), a pinhole (4), a collimating lens (5), a beam splitter prism (6), a spatial light modulator (7), a lens (8) to be measured, and an image acquisition device (9) that are sequentially arranged. Further provided is a wavefront reconstruction method based on extended rotationally symmetric structured light illumination. According to the method, a spatial light modulator is used to modulate incident parallel light into structured light similar to a phase grating; a modulation pattern of the spatial light modulator is changed, and the characteristic that a pixel unit of the spatial light modulator is not infinitely small is used, such that the spatial light modulator is made to generate different structured light; diffraction light spots are collected on a focal plane, and a target surface and a structured light surface are updated at the same time by using an algorithm, such that not only is a target to be measured recovered, a real structured light wavefront is also recovered, thereby avoiding a recovery error caused by inaccurate known structured light information.
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Inventors:
BAI JIAN (CN)
ZHAO LEI (CN)
LU BINJIE (CN)
ZHOU XIANGDONG (CN)
HOU JING (CN)
ZHAO LEI (CN)
LU BINJIE (CN)
ZHOU XIANGDONG (CN)
HOU JING (CN)
Application Number:
PCT/CN2020/102933
Publication Date:
April 15, 2021
Filing Date:
July 20, 2020
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
G01M11/02
Foreign References:
| CN110702383A | 2020-01-17 | |||
| CN107300420A | 2017-10-27 | |||
| CN110160663A | 2019-08-23 | |||
| CN104198054A | 2014-12-10 | |||
| US20140160468A1 | 2014-06-12 |
Other References:
李小平 等 (LI, XIAOPING ET AL.): "基于液晶空间光调制器的相位差波前探测技术定量研究 (Quantitative analysis on phase diversity technique based on liquid crystal spatial light modulator)", 液晶与显示 (CHINESE JOURNAL OF LIQUID CRYSTALS AND DISPLAYS), vol. 32, no. 3, 31 March 2017 (2017-03-31), XP036911918
Attorney, Agent or Firm:
FANG & ASSOCIATES (CN)
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