Title:
WAVEGUIDE-TYPE GERMANIUM PHOTOELECTRIC DETECTOR EMPLOYING PHOTONIC CRYSTAL, AND PREPARATION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/022576
Kind Code:
A1
Abstract:
A waveguide-type germanium photoelectric detector employing a photonic crystal, comprising: a silicon waveguide structure (10); and a germanium photoelectric detector (20) connected to the silicon waveguide structure (10), wherein dielectric materials (201) are periodically disposed in a germanium absorption region (202) of the germanium photoelectric detector (20) and in a peripheral silicon material region (203) at the periphery of the germanium absorption region (202), so as to form a photonic crystal structure having a slow-light effect. When compared with conventional waveguide-type germanium photoelectric detectors, the waveguide-type germanium photoelectric detector employing a photonic crystal provides improved light absorption efficiency, and facilitates reduction of the device size so as to achieve a photoelectric detector having low dark currents, low capacitance, and high responsivity.
Inventors:
WANG WEI (CN)
FANG QING (CN)
TU ZHIJUAN (CN)
ZENG YOUHONG (CN)
CAI YAN (CN)
YU MINGBIN (CN)
FANG QING (CN)
TU ZHIJUAN (CN)
ZENG YOUHONG (CN)
CAI YAN (CN)
YU MINGBIN (CN)
Application Number:
PCT/CN2019/100559
Publication Date:
February 11, 2021
Filing Date:
August 14, 2019
Export Citation:
Assignee:
SHANGHAI INDUSTRIAL MTECHNOLOGY RES INSTITUTE (CN)
International Classes:
H01L31/0232; G02B6/13; H01L31/09; H01L31/18
Foreign References:
| CN201885758U | 2011-06-29 | |||
| CN105556680A | 2016-05-04 | |||
| CN105070779A | 2015-11-18 | |||
| US20100330727A1 | 2010-12-30 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
Download PDF: