Title:
WIRING STRUCTURE FOR DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/047095
Kind Code:
A1
Abstract:
Provided is a wiring structure for display device which does not generate hillocks even when exposed to high temperatures at levels around 450-600°C, has excellent high-temperature heat resistance, keeps electrical resistance (wiring resistance) of the entire wiring structure low, and further has excellent resistance to hydrofluoric acid. This wiring structure for a display device comprises a structure in which are laminated, in order from the substrate side, a first layer of an Al alloy that contains at least one chemical element selected from the group (group X) consisting of Ta, Nb, Re, Zr, W, Mo, V, Hf, Ti, Cr and Pt and contains at least one rare earth element, and a second layer of an Al alloy nitride, or a nitride of at least one chemical element selected from the group (group Y) consisted of Ti, Mo, Al, Ta, Nb, Re, Zr, W, V, Hf and Cr.
Inventors:
OKUNO HIROYUKI
KUGIMIYA TOSHIHIRO
KUGIMIYA TOSHIHIRO
Application Number:
PCT/JP2012/072339
Publication Date:
April 04, 2013
Filing Date:
September 03, 2012
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
OKUNO HIROYUKI
KUGIMIYA TOSHIHIRO
OKUNO HIROYUKI
KUGIMIYA TOSHIHIRO
International Classes:
H01L21/3205; C22C21/00; C23C14/34; G02F1/1343; G09F9/30; H01J11/46; H01J31/12; H01J31/15; H01L21/28; H01L21/768; H01L23/532; H01L29/786; H01L51/50; H05B33/06; H05B33/14
Domestic Patent References:
| WO2011102396A1 | 2011-08-25 |
Foreign References:
| JP2004061687A | 2004-02-26 | |||
| JP2004282066A | 2004-10-07 | |||
| JP2004165289A | 2004-06-10 | |||
| JP2007093686A | 2007-04-12 | |||
| JP2000208773A | 2000-07-28 | |||
| JP2003045873A | 2003-02-14 | |||
| JP2010087068A | 2010-04-15 |
Attorney, Agent or Firm:
UEKI, Kyuichi et al. (JP)
Hisakazu Ueki (JP)
Hisakazu Ueki (JP)
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Claims: