Title:
【発明の名称】高分解能分光分析顕微方法および装置
Document Type and Number:
Japanese Patent JP2001507464
Kind Code:
A
Abstract:
A sample and a scanning probe microscope system are used as the detector for an infrared spectrometer to circumvent the diffraction limit of conventional infrared microscopy, and to provide spectroscopic images with a greatly improved spatial resolution, potentially as low as a few tens of nanometers. The beam from an infrared spectrometer is directed at the sample. The sample is heated to the extent that it absorbs infrared radiation. Thus the resulting temperature rise of an individual region depends upon the particular molecular species present, as well as the range of wavelengths of the infrared beam. These individual temperature differences are detected by a miniature thermal probe. The thermal probe is mounted in a scanning thermal microscope. The scanning thermal microscope is then operated used to produce multiple surface and sub-surface images of the sample, such that the image contrast corresponds to variations in either thermal diffusivity, surface topography or chemical composition.
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Inventors:
Claebourne, michael
Hamiche, Azedyne
Montag-Pollock, Hubert Murray
Reading, michael
Hamiche, Azedyne
Montag-Pollock, Hubert Murray
Reading, michael
Application Number:
JP52350899A
Publication Date:
June 05, 2001
Filing Date:
October 26, 1998
Export Citation:
Assignee:
Claebourne, michael
Hamiche, Azedyne
Montag-Pollock, Hubert Murray
Reading, michael
Hamiche, Azedyne
Montag-Pollock, Hubert Murray
Reading, michael
International Classes:
G01N3/60; G01N21/27; G01N21/35; G01N25/20; G01N25/48; G01Q30/02; G01Q60/58; G01N3/02; G01Q90/00; (IPC1-7): G01N25/48; G01N21/27
Attorney, Agent or Firm:
Takashi Ishida (3 others)