Title:
【発明の名称】X-Yアドレス指定可能な電気的マイクロスイッチアレイとこれを使用したセンサマトリックス
Document Type and Number:
Japanese Patent JP2002502128
Kind Code:
A
Abstract:
The present invention relates generally to fabricating two-terminal electric microswitches comprising thin semiconductor films and using these microswitches to construct column-row (x-y) addressable microswitch matrices. These microswitches are two terminal devices through which electric current and electric potential (or their derivatives or integrals) can be switched on and off by the magnitude or the polarity of the external bias. The microswitches are made from semiconducting thin films in a electrode/semiconductor/electrode, thin film configuration. Column-row addressable electric microswitch matrices can be made in large areas, with high pixel density. Such matrices can be integrated with a sensor layer with electronic properties which vary in response to external physical conditions (such as photon radiation, temperature, pressure, magnetic field and so on), thereby forming a variety of detector matrices.
Inventors:
Yugan
Khao Yong
Khao Yong
Application Number:
JP2000529758A
Publication Date:
January 22, 2002
Filing Date:
February 02, 1999
Export Citation:
Assignee:
Uniax corporation
International Classes:
G01J1/02; H01L21/00; H01L27/144; H01L27/146; H01L27/24; H01L27/28; H01L27/30; H01L29/47; H01L29/872; H01L31/09; H01L35/24; H01L45/00; H01L47/00; H01L49/02; H01L51/00; H01L51/05; H01L51/30; H01L51/42; (IPC1-7): H01L49/02; G01J1/02; H01L27/146; H01L51/00; H01L29/872; H01L31/09; H01L35/24
Domestic Patent References:
| JPH0868860A | 1996-03-12 | |||
| JPS63300576A | 1988-12-07 | |||
| JPH09181334A | 1997-07-11 |
Foreign References:
| WO1996031909A1 | 1996-10-10 | |||
| US4906855A | 1990-03-06 |
Attorney, Agent or Firm:
Yoshikazu Tani (2 outside)