Title:
【発明の名称】絶縁積層体に絶縁キャップ膜を適用するための方法
Document Type and Number:
Japanese Patent JP2002507066
Kind Code:
A
Inventors:
Van Dale Lee Yuden, Marc, Jay.
Application Number:
JP2000536902A
Publication Date:
March 05, 2002
Filing Date:
March 09, 1999
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/316; H01L21/3105; H01L21/768; (IPC1-7): H01L21/316
Attorney, Agent or Firm:
Yoshiki Hasegawa (1 person outside)