Title:
ライン状均一吐出装置、霧化装置、薄膜形成装置、パターン形成装置、三次元造形装置および洗浄装置。
Document Type and Number:
Japanese Patent JP2005105414
Kind Code:
A5
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Application Number:
JP2004263718A
Publication Date:
April 21, 2005
Export Citation:
International Classes:
C23C18/31; C23C4/00; C23C18/14; C23C16/50; B05B5/08; C23C16/452; C23C26/00; C23C24/10; C23C16/00; C23C16/08; C23C24/08; C25D13/00; C23C24/04; C23C18/20; C25D5/02; C23F4/02; B05B7/04