Title:
サブミクロン断面を有する構造素子の断面特徴を決定するためのシステム及び方法
Document Type and Number:
Japanese Patent JP2005533252
Kind Code:
A
Abstract:
A method and system for determining a cross sectional feature of a structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method includes: (a) determining a first traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and a first transverse section; (b) selecting, in response to a first parameter, whether to (i) determine a second traverse section cross sectional feature in response to the first traverse cross sectional feature, or (ii) to determine the second traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and the second transverse section; and (c) determining the second traverse section cross sectional feature in response to the selection.
Inventors:
Sender, benzion
Drool, Ophir
Tam, Aviram
Menadeva, Ovada
Chris, roman
Drool, Ophir
Tam, Aviram
Menadeva, Ovada
Chris, roman
Application Number:
JP2004521664A
Publication Date:
November 04, 2005
Filing Date:
July 11, 2003
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01B15/00; H01J37/28; H01L21/027; H01L21/66; (IPC1-7): G01B15/00; H01J37/28; H01L21/027; H01L21/66
Domestic Patent References:
| JPH01101408A | 1989-04-19 | |||
| JPS61138107A | 1986-06-25 | |||
| JPH03233310A | 1991-10-17 | |||
| JPS61128114A | 1986-06-16 | |||
| JP2004132956A | 2004-04-30 | |||
| JP2007531864A | 2007-11-08 | |||
| JPH03233309A | 1991-10-17 | |||
| JPH01311551A | 1989-12-15 | |||
| JPS63157433A | 1988-06-30 |
Foreign References:
| WO2001045136A1 | 2001-06-21 | |||
| US6472662B1 | 2002-10-29 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Yuichi Yamada