Title:
磁気抵抗センサ素子及び磁気抵抗センサ素子の角度誤差を低減する方法
Document Type and Number:
Japanese Patent JP2006508528
Kind Code:
A
Abstract:
A magnetoresistive sensor element is provided, having a magnetoresistive layer system which, in top view, is at least regionally striated. The sensor element operates on the basis of the GMR effect and is constructed according to the spin valve principle, the striated layer system featuring a reference layer having a direction of magnetization substantially uninfluenced by a direction of an outer magnetic field acting on it. During operation, the sensor element provides a measuring signal which changes as a function of a measurement angle between the component of the field strength of the outer magnetic field lying in the plane of the layer system, and the direction of magnetization, and from which this measurement angle is able to be ascertained. In addition, observed in a top view of the striated layer system, the angle between the direction of magnetization in the absence of the outer magnetic field and the longitudinal direction of the striated layer system is set in such a way that in response to an influence of the outer magnetic field having a defined field strength, which is selected from a predefined work interval, the angle error of the layer system, as a function of this angle and the field strength, is minimal.
Inventors:
Ulrich Mai
Paul Faber
Hartmut Kittel
Henrik Sieckle
Ingo Hermann
Peter Schmolung Louver
Paul Faber
Hartmut Kittel
Henrik Sieckle
Ingo Hermann
Peter Schmolung Louver
Application Number:
JP2004554185A
Publication Date:
March 09, 2006
Filing Date:
October 09, 2003
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
H01L43/08; G01R33/09
Domestic Patent References:
| JP2001217478A | 2001-08-10 | |||
| JP2000338211A | 2000-12-08 | |||
| JP2002514770A | 2002-05-21 | |||
| JPH11340541A | 1999-12-10 | |||
| JP2001006132A | 2001-01-12 | |||
| JP2002525609A | 2002-08-13 | |||
| JPH08327359A | 1996-12-13 | |||
| JPH05281319A | 1993-10-29 | |||
| JPH01214077A | 1989-08-28 | |||
| JPH08130338A | 1996-05-21 |
Foreign References:
| WO2002006845A1 | 2002-01-24 | |||
| WO2001067460A1 | 2001-09-13 |
Attorney, Agent or Firm:
Toshio Yano
Einzel Felix-Reinhard
Reinhard Einsel
Einzel Felix-Reinhard
Reinhard Einsel