Title:
界面活性剤膜を用いるレーザ切削加工
Document Type and Number:
Japanese Patent JP2006527477
Kind Code:
A
Abstract:
A surface of a workpiece (12) to be laser machined is protected by a surfactant film (11) form debris (15) produced during machining with a laser beam (14) by reducing adherence to the surface of debris produced by the laser machining. The surfactant film is preferably subsequently removed together with debris (151) deposited thereon.
Inventors:
Gillen, david
Application Number:
JP2006508262A
Publication Date:
November 30, 2006
Filing Date:
June 03, 2004
Export Citation:
Assignee:
Egsil Technology Limited
International Classes:
H01L21/301; B23K26/00; B23K26/16; B23K26/18; B23K26/38; B23K26/40; B23K101/40
Domestic Patent References:
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Foreign References:
| US20050139962A1 | 2005-06-30 | |||
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Attorney, Agent or Firm:
Shoyo domestic and overseas patent office