Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP2007507658
Kind Code:
A
Abstract:
A vacuum pump comprises a first pumping section (106), and, downstream therefrom, a second pumping section (108), The pump comprises a first pump inlet (120) through which fluid can enter the pump and pass through both the first and second pumping sections towards a pump outlet, and a second pump inlet (122) through which fluid can enter the pump and pass through only the second pumping section towards the outlet. The second pumping section (108) comprises an externally threaded rotor (109).
Inventors:
Stones Ian David
Goodwin David John
Goodwin David John
Application Number:
JP2006530558A
Publication Date:
March 29, 2007
Filing Date:
September 23, 2004
Export Citation:
Assignee:
The BOC Group plc
International Classes:
F04D19/04
Domestic Patent References:
| JPH06280785A | 1994-10-04 | |||
| JP2002147393A | 2002-05-22 | |||
| JP2002349464A | 2002-12-04 | |||
| JP2002180989A | 2002-06-26 | |||
| JP2000337290A | 2000-12-05 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato