Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP2007507659
Kind Code:
A
Abstract:
A vacuum pump (100) comprises a first set (106) of turbo-molecular stages, a molecular drag stage (112), a first inlet (120) through which fluid can pass through the first set (106) of stages and the molecular drag stage (112) towards a pump outlet (116), second and third sets (108, 110) of turbo-molecular stages located between the first set (106) and the molecular drag stage (112), a second inlet (122), the second and third sets (108, 110) being arranged such that fluid entering the pump through the second inlet (122) is separated into two streams each flowing through a respective one of the second and third sets (108, 110), and conduit means (126) for conveying fluid passing through the first set (106) and one of the second and third sets (108, 110) towards the outlet (116).
More Like This:
Inventors:
Stones Ian David
Application Number:
JP2006530560A
Publication Date:
March 29, 2007
Filing Date:
September 23, 2004
Export Citation:
Assignee:
The BOC Group plc
International Classes:
F04D19/04
Domestic Patent References:
| JPS63266188A | 1988-11-02 | |||
| JPS6375386A | 1988-04-05 | |||
| JPS4814626B1 | 1973-05-09 | |||
| JPH05141389A | 1993-06-08 | |||
| JPS6375388A | 1988-04-05 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato