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Title:
プラスチック基板上で低温無機膜を堆積させる方法及び装置
Document Type and Number:
Japanese Patent JP2007533860
Kind Code:
A
Abstract:
A method and apparatus for depositing a low temperature inorganic film onto large area plastic substrates are described in this invention. Low temperature (<80° C.) inorganic films do not adhere very well to the plastic substrate. Therefore, a low temperature (<80° C.) plasma pre-treatment is added to improve the adhesion property. The inorganic film with plasma pre-treatment shows good adhesion and hermetic properties.

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Inventors:
Hu, lee
Won, Taecyun
Application Number:
JP2007509527A
Publication Date:
November 22, 2007
Filing Date:
April 14, 2005
Export Citation:
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Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C16/46; C23C16/02; C23C16/30; C23C16/34; C23C16/40; C23C16/42; C23C16/505; H01L21/31; H01L21/316; H01L21/318; H01L51/52
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada



 
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