Title:
真空処理装置
Document Type and Number:
Japanese Patent JP2012506490
Kind Code:
A
Abstract:
An apparatus 10 for vacuum processing articles 12 or for processing articles 12 at an elevated pressure. The apparatus comprises a processing region 14 in which articles can be processed at a processing pressure and a loading region 18 into which articles can be loaded at ambient pressure. Article carriers 20 are provided for carrying articles from the loading region to the processing region along an enclosed passage 24. The carriers 20 comprise sealing means 34, 36 for sealing against an inner surface of the passage. The sealing means resist the flow of gas along the passage from the loading region to the processing region so that articles loaded at ambient pressure can be processed at processing pressure. The sealing means is disc shaped in order to conform with a pipe with a circular cross section.
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Inventors:
King, Charles Edmond
Application Number:
JP2011532706A
Publication Date:
March 15, 2012
Filing Date:
October 19, 2009
Export Citation:
Assignee:
P2 Eye Limited
International Classes:
C23C16/44
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Atsushi Honda
Miho Ikegami
Makoto Onda
Atsushi Honda
Miho Ikegami