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Document Type and Number:
Japanese Patent JP2013153164
Kind Code:
A5
More Like This:
WO/2012/014992NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE, PRODUCTION METHOD FOR SAME, AND CHARGE STORAGE FILM
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JPH0745616MANUFACTURE OF SEMICONDUCTOR DEVICE
Application Number:
JP2013007612
Publication Date:
April 14, 2016
Filing Date:
January 18, 2013
Export Citation:
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International Classes:
H01L21/318; C23C16/42; C23C16/505



 
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