Title:
静電クランプおよびイオン注入システム
Document Type and Number:
Japanese Patent JP2014509446
Kind Code:
A
Abstract:
An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface. A base is arranged to adjoin at least a portion of the second surface of the heating block. The adjoined base and heating block may mutually define an inner gap between a first portion of the heating block and the base. An outer gap is arranged concentric with the inner gap between a second portion of the heating block and the base, the inner and outer gaps being isolated from one another by a first sealing surface formed between the second surface of the heating block and the base.
Inventors:
Miller, Timothy, Jay.
Muka, Richard, S.
Break, Julian, Gee.
Muka, Richard, S.
Break, Julian, Gee.
Application Number:
JP2013547532A
Publication Date:
April 17, 2014
Filing Date:
December 19, 2011
Export Citation:
Assignee:
Varian Semiconductor Equipment Associates, Inc.
International Classes:
H01L21/683; H01J37/20; H01J37/317; H01L21/265
Domestic Patent References:
| JP2003249541A | 2003-09-05 | |||
| JP2002009139A | 2002-01-11 | |||
| JP2002009064A | 2002-01-11 | |||
| JPH09213781A | 1997-08-15 | |||
| JP2004282047A | 2004-10-07 | |||
| JP2009054965A | 2009-03-12 | |||
| JPH0997830A | 1997-04-08 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation