Title:
屈折率を測定する方法及び装置
Document Type and Number:
Japanese Patent JP2014512527
Kind Code:
A
Abstract:
A method and apparatus for measuring refractive index of an object are disclosed. The method includes, acquiring a number of first fringes of a first interference pattern formed by interference of a first beam of light transmitted through the object with a second beam of light not transmitted through the object; acquiring a number of second fringes of a second interference pattern formed by interference of a third beam of light reflected from a first surface of the object with a fourth beam of light transmitted through the object and reflected from a second surface of the object; and calculating the refractive index of the object based on the number of first fringes and the number of second fringes. The method may further include calculating the Abbe number of the object based on the refractive indices of the object measured at different wavelengths.
Inventors:
You, Chun-Che
Application Number:
JP2014501169A
Publication Date:
May 22, 2014
Filing Date:
March 19, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
G01N21/45
Domestic Patent References:
| JPH07159320A | 1995-06-23 | |||
| JP2002286989A | 2002-10-03 | |||
| JP2002537550A | 2002-11-05 | |||
| JP2001141608A | 2001-05-25 |
Foreign References:
| US20090161114A1 | 2009-06-25 |
Other References:
JPN6014043183; ＢＨＡＴＴＡＣＨＡＲＹＹＡ，Ｄ． 他: '"Ｄｉｒｅｃｔ ｍｅａｓｕｒｅｍｅｎｔ ｏｎ ｔｒａｎｓｐａｒｅｎｔ ｐｌａｔｅｓ ｂｙ ｕｓｉｎｇ Ｆｉｚｅａｕ ｉｎｔｅｒｆｅｒｏｍｅｔｒｙ"' Ｏｐｔｉｃｓ ＆ Ｌａｓｅｒ Ｔｅｃｈｎｏｌｏｇｙ Ｖｏｌｕｍｅ ３４， Ｉｓｓｕｅ １, 200202, Ｐａｇｅｓ ９３-９６
JPN6014043180; ＰＡＶＡＮ ＫＵＭＡＲ，Ｙ． 他: '"Ｓｉｍｕｌｔａｎｅｏｕｓ ｍｅａｓｕｒｅｍｅｎｔ ｏｆ ｒｅｆｒａｃｔｉｖｅ ｉｎｄｅｘ ａｎｄ ｗｅｄｇｅ ａｎｇｌｅ ｏｆ ｏｐｔｉｃａｌ ｗｉｎｄｏｗｓ ｕｓｉｎｇ Ｆｉｚｅａｕ ｉｎｔｅｒ' ＡＰＰＬＩＥＤ ＯＰＴＩＣＳ Ｖｏｌｕｍｅ ４８， Ｎｕｍｂｅｒ ２４, 20090813, Ｐａｇｅｓ ４７５６-４７６１
JPN6014043181; ＫＡＦＲＩ，Ｏ． 他: '"Ｒｅｆｒａｃｔｉｖｅ ｉｎｄｅｘ ｍｅａｓｕｒｅｍｅｎｔ ｏｆ ｏｐｔｉｃａｌ ｗｉｎｄｏｗｓ ｂｙ ａｎ ｉｎｔｅｒｆｅｒｏｍｅｔｒｉｃ-ｄｅｆｌｅｃｔｏｍｅｔｒｉｃ ｍｅｔｈｏｄ"' ＡＰＰＬＩＥＤ ＯＰＴＩＣＳ Ｖｏｌｕｍｅ ２７， Ｎｕｍｂｅｒ ２２, 19881115, Ｐａｇｅ．４６０２-４６０３
JPN6014043182; ＯＫＡＤＡ，Ｋ． 他: '"Ｓｅｐａｒａｔｅ ｍｅａｓｕｒｅｍｅｎｔｓ ｏｆ ｓｕｒｆａｃｅ ｓｈａｐｅｓ ａｎｄ ｒｅｆｒａｃｔｉｖｅ ｉｎｄｅｘ ｉｎｈｏｍｏｇｅｎｅｉｔｙ ｏｆ ａｎ ｏｐｔｉｃａｌ ｅｌｅｍｅｎｔ ｕ' ＡＰＰＬＩＥＤ ＯＰＴＩＣＳ Ｖｏｌｕｍｅ ２９， Ｎｕｍｂｅｒ ２２, 19900801, Ｐａｇｅｓ ３２８０-３２８５
JPN6014043180; ＰＡＶＡＮ ＫＵＭＡＲ，Ｙ． 他: '"Ｓｉｍｕｌｔａｎｅｏｕｓ ｍｅａｓｕｒｅｍｅｎｔ ｏｆ ｒｅｆｒａｃｔｉｖｅ ｉｎｄｅｘ ａｎｄ ｗｅｄｇｅ ａｎｇｌｅ ｏｆ ｏｐｔｉｃａｌ ｗｉｎｄｏｗｓ ｕｓｉｎｇ Ｆｉｚｅａｕ ｉｎｔｅｒ' ＡＰＰＬＩＥＤ ＯＰＴＩＣＳ Ｖｏｌｕｍｅ ４８， Ｎｕｍｂｅｒ ２４, 20090813, Ｐａｇｅｓ ４７５６-４７６１
JPN6014043181; ＫＡＦＲＩ，Ｏ． 他: '"Ｒｅｆｒａｃｔｉｖｅ ｉｎｄｅｘ ｍｅａｓｕｒｅｍｅｎｔ ｏｆ ｏｐｔｉｃａｌ ｗｉｎｄｏｗｓ ｂｙ ａｎ ｉｎｔｅｒｆｅｒｏｍｅｔｒｉｃ-ｄｅｆｌｅｃｔｏｍｅｔｒｉｃ ｍｅｔｈｏｄ"' ＡＰＰＬＩＥＤ ＯＰＴＩＣＳ Ｖｏｌｕｍｅ ２７， Ｎｕｍｂｅｒ ２２, 19881115, Ｐａｇｅ．４６０２-４６０３
JPN6014043182; ＯＫＡＤＡ，Ｋ． 他: '"Ｓｅｐａｒａｔｅ ｍｅａｓｕｒｅｍｅｎｔｓ ｏｆ ｓｕｒｆａｃｅ ｓｈａｐｅｓ ａｎｄ ｒｅｆｒａｃｔｉｖｅ ｉｎｄｅｘ ｉｎｈｏｍｏｇｅｎｅｉｔｙ ｏｆ ａｎ ｏｐｔｉｃａｌ ｅｌｅｍｅｎｔ ｕ' ＡＰＰＬＩＥＤ ＯＰＴＩＣＳ Ｖｏｌｕｍｅ ２９， Ｎｕｍｂｅｒ ２２, 19900801, Ｐａｇｅｓ ３２８０-３２８５
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu