Title:
ガス圧測定セル装置
Document Type and Number:
Japanese Patent JP2014512528
Kind Code:
A
Abstract:
A gas pressure measuring cell configuration has a thermal conduction vacuum cell according to Pirani (Pi), with a measuring chamber housing enclosing a measuring chamber and with a measuring connection which channels the gas pressure P to be measured into the measuring chamber. The measuring chamber has a heatable measuring filament connected to an electronic measuring circuitry. The electronic measuring circuitry is in thermal contact on one side of an insulating carrier plate and the carrier plate forms on the opposite side a component of the measuring chamber housing, wherein the measuring filament in series with a measuring resistor (Rm) is supplied directly by the electronic measuring circuitry in feedback and wherein the electronic measuring circuitry directly determines the resistance of the measuring filament.
Inventors:
Urs Valhiri
Bruno Berger
Daniel Vogel
Bruno Berger
Daniel Vogel
Application Number:
JP2014501381A
Publication Date:
May 22, 2014
Filing Date:
February 10, 2012
Export Citation:
Assignee:
Infikon Gamebha
International Classes:
G01L21/12
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro