透明なバリア層系を析出する方法 - Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

Title:

透明なバリア層系を析出する方法

Document Type and Number:

Japanese Patent JP2014517144

Kind Code:

A

Abstract:

The invention relates to a method for producing a transparent barrier layer system, wherein in a vacuum chamber at least two transparent barrier layers and a transparent intermediate layer disposed between the two barrier layers are deposited on a transparent plastic film, wherein for deposition of the barrier layers aluminium is vaporised and simultaneously at least one first reactive gas is introduced into the vacuum chamber and wherein for deposition of the intermediate layer aluminium is vaporised and simultaneously at least one second reactive gas is introduced into the vacuum chamber, and a silicon-containing layer is deposited as intermediate layer by means of a PECVD process.

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Inventors:

Stefen Gunther
Bian Meier
Steffen Strach
Thomas Kunel
Sebastian Bunk
Nicholas Schiller

Application Number:

JP2014505546A

Publication Date:

July 17, 2014

Filing Date:

February 15, 2012

Export Citation:

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Assignee:

Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

International Classes:

C23C14/06; B32B9/00; C23C14/08; C23C16/40; C23C16/50

Domestic Patent References:

JP2007522343A	2007-08-09
JP2006272589A	2006-10-12
JP2004093560A	2004-03-25
JP2006297730A	2006-11-02
JP2008152940A	2008-07-03
JP2007522343A	2007-08-09
JP2006272589A	2006-10-12
JP2004093560A	2004-03-25

Foreign References:

WO2009127373A1	2009-10-22
US20070170050A1	2007-07-26
US6130002A	2000-10-10
US20030148139A1	2003-08-07
WO2009127373A1	2009-10-22
US20070170050A1	2007-07-26
US6130002A	2000-10-10

Other References:

JPN5014006022; ＳＣＨＩＬＬＥＲ　Ｓ: 'ＰＶＤ　ＣＯＡＴＩＮＧ　ＯＦ　ＰＬＡＳＴＩＣ　ＷＥＢＳ　ＡＮＤ　ＳＨＥＥＴＳ　ＷＩＴＨ　ＨｉＧＨ　ＲＡＴＥＳ　ＯＮ　ＬＡＲＧＥ　ＡＲＥＡＳ' ＳＵＲＦＡＣＥ　ＡＮＤ　ＣＯＡＴＩＮＧＳ　ＴＥＣＨＮＯＬＯＧＹＶＯＬ．　１２５，　ＮＯ．　１-３, 20000301, ＰＡＧＥＳ　３５４-３６０, ＥＬＳＥＶＩＥＲ
JPN5014006023; ＦＡＨＬＴＥＩＣＨ　Ｊ: 'ＰＥＲＭＥＡＴＩＯＮ　ＢＡＲＲＩＥＲ　ＰＲＯＰＥＲＴＩＥＳ　ＯＦ　ＯＸＩＤＥ　ＬＡＹＥＲＳ　ＯＮ　ＰＯＬＹＭＥＲ　ＦＩＬＭ　ＤＥＰＯＳＩＴＥＤ　以下備考' ＡＮＮＵＡＬ　ＴＥＣＨＮＩＣＡＬ　ＣＯＮＦＥＲＥＮＣＥ　ＰＲＯＣＥＥＤＩＮＧＳＶＯＬ．　５０ＴＨ　ＣＯＮＦＥＲＥＮＣＥ, 20070101, ＰＡＧＥＳ　７２３-７２７, ＳＯＣＩＥＴＹ　ＯＦ　ＶＡＣＵＵＭ　ＣＯＡＴＥＲＳ
JPN5014006024; ＦＡＨＬＴＥＩＣＨ　ＪＯＨＮ: 'ＰＥＲＭＥＡＴＩＯＮ　ＢＡＲＲＩＥＲ　ＰＲＯＰＥＲＴＩＥＳ　ＯＦ　ＴＨＩＮ　ＯＸＩＤＥ　ＦＩＬＭＳ　ＯＮ　ＦＬＥＸＩＢＬＥ　ＰＯＬＹＭＥＲ　ＳＵＢＳＴＲＡＴＥＳ' ＴＨＩＮ　ＳＯＬＩＤ　ＦＩＬＭＳＶＯＬ．５１７，　ＮＯ．　１０, 20090331, ＰＡＧＥＳ　３０７５-３０８０, ＥＬＳＥＶＩＥＲ-ＳＥＱＵＯＩＡ　Ｓ．　Ａ．
JPN5014006022; ＳＣＨＩＬＬＥＲ　Ｓ: 'ＰＶＤ　ＣＯＡＴＩＮＧ　ＯＦ　ＰＬＡＳＴＩＣ　ＷＥＢＳ　ＡＮＤ　ＳＨＥＥＴＳ　ＷＩＴＨ　ＨｉＧＨ　ＲＡＴＥＳ　ＯＮ　ＬＡＲＧＥ　ＡＲＥＡＳ' ＳＵＲＦＡＣＥ　ＡＮＤ　ＣＯＡＴＩＮＧＳ　ＴＥＣＨＮＯＬＯＧＹＶＯＬ．　１２５，　ＮＯ．　１-３, 20000301, ＰＡＧＥＳ　３５４-３６０, ＥＬＳＥＶＩＥＲ
JPN5014006023; ＦＡＨＬＴＥＩＣＨ　Ｊ: 'ＰＥＲＭＥＡＴＩＯＮ　ＢＡＲＲＩＥＲ　ＰＲＯＰＥＲＴＩＥＳ　ＯＦ　ＯＸＩＤＥ　ＬＡＹＥＲＳ　ＯＮ　ＰＯＬＹＭＥＲ　ＦＩＬＭ　ＤＥＰＯＳＩＴＥＤ　以下備考' ＡＮＮＵＡＬ　ＴＥＣＨＮＩＣＡＬ　ＣＯＮＦＥＲＥＮＣＥ　ＰＲＯＣＥＥＤＩＮＧＳＶＯＬ．　５０ＴＨ　ＣＯＮＦＥＲＥＮＣＥ, 20070101, ＰＡＧＥＳ　７２３-７２７, ＳＯＣＩＥＴＹ　ＯＦ　ＶＡＣＵＵＭ　ＣＯＡＴＥＲＳ
JPN5014006024; ＦＡＨＬＴＥＩＣＨ　ＪＯＨＮ: 'ＰＥＲＭＥＡＴＩＯＮ　ＢＡＲＲＩＥＲ　ＰＲＯＰＥＲＴＩＥＳ　ＯＦ　ＴＨＩＮ　ＯＸＩＤＥ　ＦＩＬＭＳ　ＯＮ　ＦＬＥＸＩＢＬＥ　ＰＯＬＹＭＥＲ　ＳＵＢＳＴＲＡＴＥＳ' ＴＨＩＮ　ＳＯＬＩＤ　ＦＩＬＭＳＶＯＬ．５１７，　ＮＯ．　１０, 20090331, ＰＡＧＥＳ　３０７５-３０８０, ＥＬＳＥＶＩＥＲ-ＳＥＱＵＯＩＡ　Ｓ．　Ａ．

Attorney, Agent or Firm:

Einzel Felix-Reinhard
Takuya Kuno

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