Document Type and Number:
Japanese Patent JP2016162786
Kind Code:
A5
Application Number:
JP2015037512
Publication Date:
June 22, 2017
Filing Date:
February 27, 2015
Export Citation:
International Classes:
H01L29/872; H01L29/47; H01L21/28; H01L29/41; H01L29/06; H01L21/329; H01L29/868; H01L29/861
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