Title:
APPLICATION DEVICE AND APPLICATION METHOD
Document Type and Number:
Japanese Patent JP2018122254
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an application device which can inhibit damage of a mass measuring device.SOLUTION: An application device draws drawing patterns of a functional fluid on substrates and includes: a substrate holding part which holds a substrate; a droplet discharge part which discharges droplets of the functional fluid to the substrate held by the substrate holding part; a moving part which relatively moves the substrate holding part and the droplet discharge part in a main scanning direction and a sub scanning direction; a mass measuring part including a cup which receives the droplets discharged by the droplet discharge part, and a mass measuring device which measures a mass of the functional fluid remaining in the cup; and a drain part which drains the functional fluid remaining in the cup from the cup.SELECTED DRAWING: Figure 8
More Like This:
Inventors:
MINE YOSUKE
MIYAZAKI KAZUHITO
MIYAZAKI KAZUHITO
Application Number:
JP2017017053A
Publication Date:
August 09, 2018
Filing Date:
February 01, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B05C11/10; B05C5/00; B05D1/26; B05D3/00; G01G19/52; H01L51/50; H05B33/10
Domestic Patent References:
| JP2009045546A | 2009-03-05 | |||
| JP2007136450A | 2007-06-07 | |||
| JP2009022915A | 2009-02-05 | |||
| JP2004177262A | 2004-06-24 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito