Title:
AIR SHOWER DEVICE
Document Type and Number:
Japanese Patent JP2018136081
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reliably suppress dust from entering a clean room.SOLUTION: An air shower device is configured to spray clean air, where dust has been removed with a filter, to a person or article in an apparatus by an air jet, to remove dust. The air shower device includes: a static electricity removal device configured to generate ions for neutralizing static electricity; an electrostatic charge measuring instrument configured to measure electrostatic potential of a person or article in the apparatus; a timer device configured to set an operation time of the air jet; and a control unit. The control unit is configured to, when an operation time of the air jet reaches the operation time set by the timer device, and the electrostatic potential measured by the electrostatic charge measuring instrument is not more than predetermined potential, stop the air jet.SELECTED DRAWING: Figure 6
Inventors:
YADA YOICHI
SATO HIROTOSHI
YOSHII YASUO
SATO HIROTOSHI
YOSHII YASUO
Application Number:
JP2017030926A
Publication Date:
August 30, 2018
Filing Date:
February 22, 2017
Export Citation:
Assignee:
HITACHI INDUSTRY EQUIPMENT SYSTEMS CO LTD
International Classes:
F24F7/007; F24F7/06
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Foreign References:
| WO2003070812A1 | 2003-08-28 | |||
| US20160069576A1 | 2016-03-10 |
Attorney, Agent or Firm:
Aoritsu patent business corporation