Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2018153738
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce costs for detecting an unlighted state.SOLUTION: An ultraviolet light irradiation device 4 includes Na (Na≥2) LED chips 18 and an unlighting detection circuit 26 to detect an unlighted state of the LED chips 18. The ultraviolet light irradiation device irradiates light of the LED chips 18 to a planar irradiation target surface of a workpiece W. The unlighting detection circuit 26 is configured to detect the unlighted state occurred in Nc LED chips 18 on the basis of a current drop of a power supply line L that supplies driving electric power to the Nc LED chips 18.SELECTED DRAWING: Figure 4
Inventors:
ISHITOBI HIROKAZU
KAWANABE YASUBUMI
KAWANABE YASUBUMI
Application Number:
JP2017051490A
Publication Date:
October 04, 2018
Filing Date:
March 16, 2017
Export Citation:
Assignee:
IWASAKI ELECTRIC CO LTD
International Classes:
B01J19/12; F21S2/00; F21V23/00; G02F1/13; H01L33/00
Attorney, Agent or Firm:
Patent Business Corporation Kushibuchi International Patent Office