Title:
ELASTIC WAVE DEVICE
Document Type and Number:
Japanese Patent JP2018182354
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an elastic wave device capable of effectively suppressing unnecessary waves.SOLUTION: An elastic wave device 1 includes: a piezoelectric substrate 2 (piezoelectric substrate); a plurality of elastic wave resonators configured in the piezoelectric substrate 2; and a first dielectric film 8 (dielectric film) provided on the piezoelectric substrate 2 so as to cover the plurality of elastic wave resonators. The plurality of elastic wave resonators each include an IDT electrode provided on the piezoelectric substrate 2. When a wave length defined by an electrode finger pitch of the IDT electrode is denoted by λ, the plurality of elastic wave resonators include at least two elastic wave resonators having different wavelengths of λ. In arbitrary two elastic wave resonators having different wavelengths of λ, a film thickness of the IDT electrode of the elastic wave resonator having longer wavelength λ is equal to or smaller than a film thickness of the IDT electrode of the elastic wave resonator having shorter wavelength λ, and at least two elastic wave resonators of the plurality of elastic wave resonators have the IDT electrodes having different film thicknesses and use Rayleigh wave.SELECTED DRAWING: Figure 1
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Inventors:
DAIMON KATSUYA
MICHIUE AKIRA
NAKAI YASUHARU
YONEDA TOSHIMARO
MICHIUE AKIRA
NAKAI YASUHARU
YONEDA TOSHIMARO
Application Number:
JP2017073399A
Publication Date:
November 15, 2018
Filing Date:
April 03, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
H03H9/145
Attorney, Agent or Firm:
Patent business corporation Miya saki, table of contents patent office