Title:
CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER
Document Type and Number:
Japanese Patent JP2019023613
Kind Code:
A
Abstract:
To provide a capacitive microelectromechanical accelerometer having a strong structure against mechanical shock and outside stress.SOLUTION: A rotor constituted of rotor bars 13, 14, and 15 comprises: one or more first brake plates 101 and 102 at the first side of the rotor rotation axis RRA; and one or more first brake plates 103 and 104 at the second side of the rotor rotation axis RRA. One or more second brake plates are fixed to an internal package plane above/below at least a part of the one or more first brake plates 101 to 104. The first brake plates 101 to 104 are overlapped with projections of the second brake plates at both sides of the rotor rotation axis RRA.SELECTED DRAWING: Figure 1
Inventors:
MATTI LIUKKU
VILLE-PEKKA RYTKOENEN
VILLE-PEKKA RYTKOENEN
Application Number:
JP2018080016A
Publication Date:
February 14, 2019
Filing Date:
April 18, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
G01P15/08; G01P15/125; G01P15/18
Attorney, Agent or Firm:
Shuichi Yoshikawa
Masao Sakajima
Masao Sakajima