CAPACITIVE MICRO ELECTRO MECHANIC SYSTEM ACCELEROMETER

Title:

CAPACITIVE MICRO ELECTRO MECHANIC SYSTEM ACCELEROMETER

Document Type and Number:

Japanese Patent JP2019023614

Kind Code:

A

Abstract:

To provide a capacitive micro electro mechanic system accelerometer capable of self-checking.SOLUTION: A rotor is a seesaw frame composed of rotor bars 13, 14, 15. The rotor bars 14, 15 in the longitudinal direction include one or more first deflection electrodes. Second deflection electrodes are fixed so as to be overlapped with each other on the inner package plane of the upper part and/or the lower part of one or more first deflection electrodes. An accelerometer can be constituted so that self-checking is executed by applying a test voltage to at least one of the first deflection electrodes and at least one of the second deflection electrodes. A response signal of self-checking can be read by electrostatic capacitance measurement between a rotor electrode finger 131 and a stator electrode finer 171.SELECTED DRAWING: Figure 1

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Inventors:

MATTI LIUKKU
VILLE-PEKKA RYTKOENEN

Application Number:

JP2018080032A

Publication Date:

February 14, 2019

Filing Date:

April 18, 2018

Export Citation:

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Assignee:

MURATA MANUFACTURING CO

International Classes:

G01P21/00; G01P15/08; G01P15/125

Attorney, Agent or Firm:

Shuichi Yoshikawa
Masao Sakajima

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