Title:
RF HEATING SYSTEM PROVIDED WITH PHASE DETECTION FOR IMPEDANCE NETWORK TUNING
Document Type and Number:
Japanese Patent JP2019096600
Kind Code:
A
Abstract:
To provide a system and a method for tuning an impedance network of a device.SOLUTION: An RF signal is provided through a transmission path connected to an impedance matching circuit network that includes a first variable component and a second variable component. A phase angle between a transmission signal and a reflected signal along the transmission path is determined. On the basis of the phase angle between the transmission signal and the reflected signal, the first variable component is modified to improve impedance match between an RF signal source and an electrode. After modifying the first variable component, a ratio of power of the reflected signal to power of the transmission signal is determined, and an inductance of the second variable component is modified to reduce the ratio of the power of the reflected signal to the power of the transmission signal.SELECTED DRAWING: Figure 10
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Inventors:
LIONEL MONGIN
PIERRE MARIE JEAN PIEL
JAMES ERIC SCOTT
PIERRE MARIE JEAN PIEL
JAMES ERIC SCOTT
Application Number:
JP2018185578A
Publication Date:
June 20, 2019
Filing Date:
September 28, 2018
Export Citation:
Assignee:
NXP USA INC
International Classes:
H05B6/66; H03H7/38; H03H7/40
Domestic Patent References:
| JP2017165000A | 2017-09-21 |
Foreign References:
| US20020047009A1 | 2002-04-25 | |||
| US20120000888A1 | 2012-01-05 | |||
| US20160248396A1 | 2016-08-25 |
Attorney, Agent or Firm:
Atsushi Honda