Title:
OPTICAL SCAN HEIGHT MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2019100720
Kind Code:
A
Abstract:
To provide an optical scan height measuring device with which it is possible to efficiently measure the shape of a desired portion of a measurement object.SOLUTION: A measurement region V is set upward of an optical bench 111. A measurement object S is placed on the optical bench 111. The measurement object S in the measurement region V is imaged and displayed on a display unit. A measurement line is designated on the displayed image. A light movement line intersecting one or a plurality of portions of the measurement line is set. A linear region LV that corresponds to the light movement line set on the image is set on the measurement region V. The measurement region V is irradiated with a measurement beam MB so as to move in the linear region LV. At this time, the height of one or a plurality of portions on the measurement object S that correspond to the light movement line is calculated on the basis of the deflection direction of the measurement beam MB with which the measurement region V is irradiated or the irradiated position on an image RI of the measurement beam MB and the received light signal of a light-receiving unit that receives the light reflected by the measurement region V.SELECTED DRAWING: Figure 28
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Inventors:
AKISHIBA YUUJI
Application Number:
JP2017228238A
Publication Date:
June 24, 2019
Filing Date:
November 28, 2017
Export Citation:
Assignee:
KEYENCE CO LTD
International Classes:
G01B11/02
Attorney, Agent or Firm:
Yoshito Fukushima
Masahiro Nakagawa
Sawamura Hideyuki
Masahiro Nakagawa
Sawamura Hideyuki