Title:
OPTICAL SCAN HEIGHT MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2019100719
Kind Code:
A
Abstract:
To provide an optical scan height measuring device with which it is possible to efficiently measure the shape of a desired portion of a measurement object.SOLUTION: In response to a measurement instruction, a target point that corresponds to a designated point on a reference image is set on the basis of the reference image. The light emitted from a light emitting unit 231 is deflected by a scan unit 270, and a portion of a measurement object S that corresponds to the target point is irradiated with the light. The value of a measurement item including the height of the portion of the measurement object S that corresponds to the target point is calculated on the basis of the deflection direction of the scan unit 270 or the position irradiated by the light deflected by the scan unit 270 and the received light signal outputted by a measurement unit 232. The value of measurement item calculated for each measurement instruction is recorded by a recording unit. The measured image, the value of measurement item, and statistical data based on the values of one or a plurality of measurement items already recorded in the recording unit are displayed on a display unit.SELECTED DRAWING: Figure 3
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Inventors:
SUGINO KIMIHIKO
Application Number:
JP2017228237A
Publication Date:
June 24, 2019
Filing Date:
November 28, 2017
Export Citation:
Assignee:
KEYENCE CO LTD
International Classes:
G01B11/04
Attorney, Agent or Firm:
Yoshito Fukushima
Masahiro Nakagawa
Sawamura Hideyuki
Masahiro Nakagawa
Sawamura Hideyuki