Title:
OPENING/CLOSING VALVE AND SUBSTRATE PROCESSING DEVICE WITH THE OPENING/CLOSING VALVE
Document Type and Number:
Japanese Patent JP2020003042
Kind Code:
A
Abstract:
To provide an opening/closing valve capable of preventing leak occurrence in a contact portion of a valve body and a valve seat part, and a substrate processing device with the opening/closing valve.SOLUTION: A valve body side electromagnet part 43 is provided at the side of a valve body 41, and a permanent magnet part 36 is provided at the side of a valve seat part 35. When a current supply circuit 11 supplies a current in a first direction to the valve body side electromagnet part 43, the valve body side electromagnet part 43 generates a magnetic field. Therefore, the valve body side electromagnet part 43 is attracted to the permanent magnet part 36. Namely, a force of attraction by the magnetic field acts on the valve body 41 and the valve seat part 35. Thus, the valve body 41 is made closer to the valve seat part 35, and the valve body 41 is pressed to the valve seat part 35. The valve body 41 is pressed to the valve seat part 35 uniformly in a circumferential direction of the valve seat part 35. Thus, the valve body 41 and the valve seat part 35 are surely brought into contact, and leak occurrence is prevented.SELECTED DRAWING: Figure 2
Inventors:
KUSUHARA MITSUYA
Application Number:
JP2018124922A
Publication Date:
January 09, 2020
Filing Date:
June 29, 2018
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F16K31/08; F16K31/06; H01L21/304
Attorney, Agent or Firm:
Tsutomu Sugiya
Hiroyuki Todaka
Tomohiko Sugitani
Kurihara Kaname
Nobuyoshi Aono
Hiroyuki Todaka
Tomohiko Sugitani
Kurihara Kaname
Nobuyoshi Aono