Title:
AIR FLOW REGULATION METHOD FOR CLEAN ROOM, AIR FLOW CALCULATION DEVICE FOR CLEAN ROOM, AND CLEAN ROOM
Document Type and Number:
Japanese Patent JP2020106169
Kind Code:
A
Abstract:
To suppress deviation of air flow actually formed in a clean room from desired air flow.SOLUTION: In an air flow regulation method, a target flow rate to pass through each of a plurality of regions of a floor in a unit time is calculated (S101, S102), a size of an open region not closed in each ventilation hole is specified (S103), an air velocity to pass through each region is measured (S104), a specific flow rate of the air passing through the region in a unit time is calculated by using the total size of the open region included in each region and the velocity of air flow passing through the region (S105), and a size of the open region of each ventilation hole is changed to reduce an absolute value of difference between the target flow rate and the specific flow rate (S106, S107).SELECTED DRAWING: Figure 4
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Inventors:
SUGAI SHIYUNTA
Application Number:
JP2018242939A
Publication Date:
July 09, 2020
Filing Date:
December 26, 2018
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
F24F7/06; F24F7/007; F24F7/10; F24F11/74
Attorney, Agent or Firm:
Fukami patent office