Title:
GRINDING METHOD
Document Type and Number:
Japanese Patent JP2020199596
Kind Code:
A
Abstract:
To prevent a stripe pattern from being formed on a work-piece without impairing productivity, in grinding the work-piece.SOLUTION: A grinding method performs a preparation step in which in a state where an inclination relation is adjusted so that a holding surface 20a of holding means 2 holding a work-piece W is in parallel with a grinding surface 340a of a grindstone 340 for grinding, the grinding stone 340 is positioned at a position away from the work-piece W in a horizontal direction parallel to the holding surface 20a, and further the grinding surface 340a of the grindstone 340 for grinding is positioned lower than an upper surface Wa of the work-piece W in a direction perpendicular to the holding surface 20a; and then performs a grinding step in which holding means 2 is made approach the grindstone 340 that rotates, using horizontally-moving means 5, while rotating the work-piece W held by the holding means 2 by rotating the holding means 2 using a rotation mechanism 23 to make the grindstone grind the work-piece W, from an outer periphery We toward a center Wo of the work-piece and keep grinding the work-piece until the grindstone 340 is positioned at the center Wo of the work-piece W.SELECTED DRAWING: Figure 2
Inventors:
WOO JUNSOO
Application Number:
JP2019108555A
Publication Date:
December 17, 2020
Filing Date:
June 11, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/00; B24B41/06; H01L21/304
Foreign References:
| WO2001022484A1 | 2001-03-29 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office