Title:
GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2020199597
Kind Code:
A
Abstract:
To enable a grinding device for grinding a workpiece to accurately recognize a residual quantity of a grinding stone.SOLUTION: A grinding device 1 comprises: grinding means 7 to which a grinding wheel 74 in which a grinding stone 741 grinding a workpiece W held by holding means 30 is annularly arranged on a wheel base 740 is rotatably mounted; and grinding/feeding means 5 that moves up and down the grinding means 7 in a direction perpendicular to a holding surface 300a, the grinding device 1 further comprises: a detector 8 that detects a lower surface 741a of the grindstone 741 and a lower surface of the wheel base 740 at a time when the grinding means 7 is moved down by the grinding/feeding means 5; and a residual quantity recognition unit 92 that recognizes, as a residual quantity of the grindstone 741, difference between a height of the grinding means 7 at a time when the grinding means 7 is moved down and the detector 8 detects the lower surface 741a of the grindstone 741 and a height of the grinding means 7 at a time when the grinding means 7 is moved down further and the detector 8 detects the lower surface of the wheel base 740.SELECTED DRAWING: Figure 1
Inventors:
GENOEN JIRO
MORI TAKENOBU
MORI TAKENOBU
Application Number:
JP2019108558A
Publication Date:
December 17, 2020
Filing Date:
June 11, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B47/22; B24B7/04; B24B49/10; B24B49/12; H01L21/304
Domestic Patent References:
| JP2008087104A | 2008-04-17 | |||
| JP2012135853A | 2012-07-19 | |||
| JP2015036170A | 2015-02-23 | |||
| JP2013144327A | 2013-07-25 |
Foreign References:
| US6572444B1 | 2003-06-03 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office