Title:
DISPERSION METHOD OF CONDUCTIVE PARTICLE, AND ELECTROSTATIC ADSORPTION APPARATUS
Document Type and Number:
Japanese Patent JP2021074707
Kind Code:
A
Abstract:
To provide a dispersion method of conductive particles capable of two-dimensionally arranging conductive particles distantly from each other on a substrate.SOLUTION: An electrostatic adsorption apparatus 1 is equipped with a first electrode 4 including an arrangement part 2 having electrostatic diffusibility or electrical conductivity on which particles are arranged and a second electrode 7 including an adsorption part 5 having electrostatic diffusibility or electrical conductivity that faces the arrangement part 2. A dispersion method of conductive particles includes a step for forming an electric field between the first electrode 4 and the second electrode 7 of the electrostatic adsorption apparatus 1 and thus moving reciprocally compound particles P formed by adsorbing conductive particles of a smaller size than carrier particles to the carrier particles and arranged on the arrangement part 2 between the arrangement part 2 and the adsorption part 5 to adsorb the conductive particles to the adsorption part 5.SELECTED DRAWING: Figure 1
Inventors:
YAMAZAKI SHOHEI
IZAWA HIROYUKI
SUGIMOTO TOSHIYUKI
IZAWA HIROYUKI
SUGIMOTO TOSHIYUKI
Application Number:
JP2020134877A
Publication Date:
May 20, 2021
Filing Date:
August 07, 2020
Export Citation:
Assignee:
SHOWA DENKO MATERIALS CO LTD
UNIV YAMAGATA
UNIV YAMAGATA
International Classes:
B01J19/08; B32B5/16; B32B37/24; B32B38/18; C03C17/06; H01B13/00
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Yoshinori Shimizu
Hiroyuki Hirano