Title:
PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND MULTIPLEXER
Document Type and Number:
Japanese Patent JP2021158511
Kind Code:
A
Abstract:
To provide a piezoelectric thin-film resonator capable of suppressing Q-value reduction and suppressing piezoelectric film damage.SOLUTION: A piezoelectric thin-film resonator 100 has a substrate 10, a lower electrode 12, an upper electrode 16, a piezoelectric film 14, and an insertion film 28. The lower electrode 12 is provided on the substrate with an air gap 30 between the same and the substrate. The upper electrode 16 is provided on the lower electrode 12. The piezoelectric film 14 has a lower piezoelectric film 14a and an upper piezoelectric film 14b. The lower piezoelectric film 14a has its end face farther from the air gap than the upper piezoelectric film 14b. The insertion film 28 is inserted between the lower piezoelectric film 14a and the upper piezoelectric film 14b.SELECTED DRAWING: Figure 1
Inventors:
TAKAHASHI HIROKI
NISHIZAWA TOSHIO
OKAMURA RYUICHI
NISHIZAWA TOSHIO
OKAMURA RYUICHI
Application Number:
JP2020056605A
Publication Date:
October 07, 2021
Filing Date:
March 26, 2020
Export Citation:
Assignee:
TAIYO YUDEN KK
International Classes:
H03H9/17; H03H9/58; H03H9/70
Attorney, Agent or Firm:
Shuhei Katayama