Title:
【考案の名称】プラズマ処理装置の蓋体支持構造
Document Type and Number:
Japanese Patent JP2536859
Kind Code:
Y2
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Inventors:
Hijikata Isamu
Application Number:
JP9524390U
Publication Date:
May 28, 1997
Filing Date:
September 11, 1990
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Domestic Patent References:
| JP5519872A |
Attorney, Agent or Firm:
Tomiho Inamoto (3 outside)