Title:
【発明の名称】電子サイクロトロン共鳴プラズマの化学蒸着装置
Document Type and Number:
Japanese Patent JP2548785
Kind Code:
B2
Inventors:
KAWAI YOSHINOBU
TAKEUCHI YOSHIAKI
MURATA MASAYOSHI
UCHIDA SATOSHI
TAKEUCHI YOSHIAKI
MURATA MASAYOSHI
UCHIDA SATOSHI
Application Number:
JP32304888A
Publication Date:
October 30, 1996
Filing Date:
December 21, 1988
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
C23C16/50; C23C16/27; C23C16/511; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): C23C16/50; H01L21/205; H01L21/3065; H01L21/31
Domestic Patent References:
JP2170979A | ||||
JP2137223A | ||||
JP62116775A | ||||
JP63318099A |
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)