Title:
【考案の名称】露光光学装置
Document Type and Number:
Japanese Patent JP2553215
Kind Code:
Y2
Inventors:
Tatsuya Murai
Tadahide Soda
Tadahide Soda
Application Number:
JP11640790U
Publication Date:
November 05, 1997
Filing Date:
November 05, 1990
Export Citation:
Assignee:
株式会社リコー
International Classes:
G03G15/04; G03B27/50; (IPC1-7): G03B27/50
Domestic Patent References:
| JP6199130A |
Attorney, Agent or Firm:
Ariga Gunichiro