Title:
【発明の名称】焦電型赤外線アレイセンサ
Document Type and Number:
Japanese Patent JP2553569
Kind Code:
B2
Abstract:
PURPOSE:To easily increase the density of sensors and to prevent the exfoliation and crack of a thin film by the thermal stress of a thin pyroelectric film by removing parts of a substrate in contact with the thin pyroelectric film. CONSTITUTION:This sensor has the substrate 1, the thin continuous pyroelectric film 3 formed thereon, plural separated thin electrode film 4 groups formed thereon, the thin electrode films 9 formed on the substrate 1 side face of the thin film 3, and a thin org. film 5 coating at least one face of the thin film 3. Low crosstalks are realized and the sensitivity is improved by removing parts of the substrate 1 in contact with the thin film 3 even if the respective elements are not separated and, therefore, the higher density is obtd. The exfoliation and crack of the thin film are prevented and since the thin org. film is used, the mechanical Q of the sensor parts is decreased and the noises by vibration and sound are suppressed.
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Inventors:
TAKAYAMA RYOICHI
TOMITA YOSHIHIRO
TOMITA YOSHIHIRO
Application Number:
JP17025287A
Publication Date:
November 13, 1996
Filing Date:
July 08, 1987
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01J1/02; C30B29/22; C30B29/32; H04N5/33; (IPC1-7): G01J1/02; H04N5/33
Domestic Patent References:
| JP62162930A | ||||
| JP6246217A | ||||
| JP62822A |
Attorney, Agent or Firm:
Tomoyuki Takimoto