Title:
【発明の名称】シリサイドターゲットとその製造方法
Document Type and Number:
Japanese Patent JP2594794
Kind Code:
B2
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Inventors:
Sawada Susumu
Yuichi Numata
Osamu Kano
Yuichi Numata
Osamu Kano
Application Number:
JP19527787A
Publication Date:
March 26, 1997
Filing Date:
August 06, 1987
Export Citation:
Assignee:
Japan Energy Co., Ltd.
International Classes:
C04B35/58; C23C14/34; (IPC1-7): C23C14/34; C04B35/58
Domestic Patent References:
JP6270270A | ||||
JP59208071A | ||||
JP6374967A |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)