【発明の名称】電界効果トランジスタの製造方法

Title:

【発明の名称】電界効果トランジスタの製造方法

Document Type and Number:

Japanese Patent JP2607310

Kind Code:

B2

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Inventors:

Yoshikazu Nakagawa

Application Number:

JP33931490A

Publication Date:

May 07, 1997

Filing Date:

November 30, 1990

Export Citation:

Assignee:

ROHM Co., Ltd.

International Classes:

H01L29/417; H01L21/338; H01L29/778; H01L29/812; (IPC1-7): H01L21/338; H01L29/778; H01L29/812

Domestic Patent References:

Attorney, Agent or Firm:

Kenji Yoshida

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