Title:
【発明の名称】超電導素子および作製方法
Document Type and Number:
Japanese Patent JP2641969
Kind Code:
B2
Abstract:
PURPOSE:To make it possible to eliminate the need for a fine processing technology and prepare a high performance device which uses an oxide superconductor by controlling a superconducting current flowing in a superconducting circuit with gate voltage. CONSTITUTION:A gate electrode 4 is installed to a superconducting device in order to control a superconducting channel 10 by an oxide superconductor, a source electrode 2 which passes electric current thereto, a drain electrode 3, and electric current flowing in the superconducting channel. The main current flows in the superconductor. The superconducting channel is turned on and off with the voltage applied to the gate electrode 4. Energy is applied to a part which forms a superconducting channel for a thin film 1 by using focusing ion beam, laser or the like so that the component elements of a substrate 5 located below may be diffused, thereby forming a non-superconducting region in the thin film 1. This construction makes it possible to produce the superconducting channel from the superconductive portion whose thickness is reduced.
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Inventors:
NAKAMURA TAKAO
INADA HIROSHI
IIYAMA MICHITOMO
INADA HIROSHI
IIYAMA MICHITOMO
Application Number:
JP25785190A
Publication Date:
August 20, 1997
Filing Date:
September 27, 1990
Export Citation:
Assignee:
SUMITOMO DENKI KOGYO KK
International Classes:
H01L39/22; H01L39/24; (IPC1-7): H01L39/22; H01L39/24
Domestic Patent References:
| JP1170080A | ||||
| JP2234479A | ||||
| JP1214178A | ||||
| JP63273371A | ||||
| JP63281481A | ||||
| JP6486577A |
Attorney, Agent or Firm:
Keiko Okabe