Title:
【発明の名称】半導体ウエハー固定用マウントテーブル及び半導体ウエハーのダイシング方法
Document Type and Number:
Japanese Patent JP2645849
Kind Code:
B2
More Like This:
Inventors:
KURODA HIDEO
KAWACHI SHINPEI
KAWACHI SHINPEI
Application Number:
JP7287088A
Publication Date:
August 25, 1997
Filing Date:
March 25, 1988
Export Citation:
Assignee:
BANDOO KAGAKU KK
International Classes:
H01L21/301; B28D5/00; H01L21/78; (IPC1-7): H01L21/301; B28D5/00
Domestic Patent References:
| JP6293953A | ||||
| JP50126710A | ||||
| JP61187248A | ||||
| JP6197848A | ||||
| JP61263136A | ||||
| JP62157051U | ||||
| JP61189866U | ||||
| JP59149289U | ||||
| JP62196341U |
Attorney, Agent or Firm:
Makino Itsuro