Title:
【発明の名称】超臨界流体汚染モニタ
Document Type and Number:
Japanese Patent JP2661854
Kind Code:
B2
Abstract:
A system for monitoring changes in the amount of contaminants present in a flowing stream of supercritical fluid. A sample stream is removed from a flowing stream of supercritical fluid and subjected to reduced pressure. The supercritical fluid turns into gas at the reduced pressure with the contaminants remaining in a non-gaseous form. A quartz crystal microbalance system measures changes in the amount of non-gaseous contaminants present in the sample stream. The system is useful in monitoring both cleaning processes and extraction processes utilizing supercritical fluids.
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Inventors:
EDOWAADO ESU DEI MIRIA
DAARERU EE GURAICHOOFU
TOOMASU II HOWAITEINGU
DAARERU EE GURAICHOOFU
TOOMASU II HOWAITEINGU
Application Number:
JP1028193A
Publication Date:
October 08, 1997
Filing Date:
January 25, 1993
Export Citation:
Assignee:
EICHI II HOORUDEINGUSU INC DEII BII EE HYUUZU EREKUTORONIKUSU
International Classes:
G01N5/02; G01N5/04; G01N1/20; (IPC1-7): G01N5/02
Domestic Patent References:
| JP6317455U |
Other References:
【文献】米国特許3863495(US,A)
Attorney, Agent or Firm:
Takehiko Suzue